HORIBA STEC SEC-Z500 SERIES MFC'S
Multi-gas, multi-range Digital Mass Flow Controllers
High accuracy for all ranges (+/- 1.0% S.P.) with piezo actuator valve. High speed response: 1 second response time between any two setpoints, and all-metal design.
- Standard sizes used for EPI and other processes in stock
- Digital / Analog communications models only in stock
- Models with 1/4" & 1/2" VCR fittings only in stock
- Some models avaialble with Normally Open (N/O) valves
- Please specify gas and flow rate when ordering
- Same day shipping available
System Refurbishment
Here is a basic overview of our refurbishment process...
- System is stripped to the bare frame, and cleaned. Frame is sent out for sandblast and powdercoat if needed.
- All sub-assemblies are disassembled and cleaned.
- Stainless parts are cleaned and sent out for electropolish and passivation.
- Nickel parts are cleaned and sent out for strip/re-nickel if needed.
- MFCs are sent out for cleaning and calibration/resizing.
- When frame returns from powdercoat, all new water lines and pneumatic lines are installed.
- Subassemblies are rebuilt with new o-rings and seals.
- Chamber trays and Wiring harnesses are installed.
- Buffer chamber is installed and loadlocks are mounted.
- Orienter, cooldown, and process chambers are installed.
- Gas panel and gas lines are cleaned and reassembled. Parts are replaced as needed.
- Entire system is helium leak checked including gas panel.
- Once assembly is complete, system is final tested to Tier I level.