HORIBA STEC SEC-Z500 SERIES MFC'S
Multi-gas, multi-range Digital Mass Flow Controllers
High accuracy for all ranges (+/- 1.0% S.P.) with piezo actuator valve. High speed response: 1 second response time between any two setpoints, and all-metal design.
- Standard sizes used for EPI and other processes in stock
- Digital / Analog communications models only in stock
- Models with 1/4" & 1/2" VCR fittings only in stock
- Some models avaialble with Normally Open (N/O) valves
- Please specify gas and flow rate when ordering
- Same day shipping available
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