flowPoint^®

flowPoint^® System

flowPoint^® stepper driven diaphram metering valves were designed to replace the older technology Nanovalve^® (Nanomover) stepper driven bellows metering valves.

Tuning gas flow can be a time consuming chore for your mass-flow dependent CVD processes. Traditional manual metering valves require expensive tool downtime, multiple test runs, and great care from an operator to achieve critical specifications.

HD Pacific's patented micropositioning technology controls a high-purity diphram valve to provide high-resolution, repeatable process set points, enabling precision tuning of gas flows. Automate gas flows remotely and quickly to eliminate downtime, multiple test runs, and the tedious adjustment procedure required of manual valves.

Product Specifications

flowPoint^® uses a stepper motor to drive a cam to move the plunger of a diaphram valve. The position of the diaphragm can be precisely adjusted, allowing precise control of the flow rate of gas through the valve. This precise adjustment creates linear gas flow rates that provide uniform film thicknesses. Adjusting film thickness is much easier and more reliable.

Control flows with an easy to use operator interface with options for a handheld terminal, a PC using an RS-232 port, or a 0-10 Volt analog input. Achieve a repeatable process, returning to previous flow rates within 1.0% of full-scale

Replace tedious manual metering valves with an easy to integrate modular system, proven worldwide