Multi-gas, multi-range Digital Mass Flow Controllers
High accuracy for all ranges (+/- 1.0% S.P.) with piezo actuator valve. High speed response: 1 second response time between any two setpoints, and all-metal design.
Standard sizes used for EPI and other processes in stock
Digital / Analog communications models only in stock
Models with 1/4" & 1/2" VCR fittings only in stock
Some models avaialble with Normally Open (N/O) valves
