208V or 480V.
Upgrade shows digital display of flow and temperature, with adjustable alarm limits.
Replacement for the original SCSI floppy drives in AMAT systems. Store up to 100 "floppies" on one USB dthumb drive.
Replacement for the original SCSI hard drives in AMAT systems. Comes with a 32GB Solid State Drive.
Conversion from HP to HP+ or VHP/VHP+, Conversion from standard magnets to corrosion resistant magnets.
Remote centerfinder to On-The-Fly (OTF) Centerfinding.
Upgrade to individual dual seal and rim pressure swithes (digital).
Add additional chambers to your system to improve throughput while maximizing cleanroom space.
Convert your existing 5" or 6" system to 8" or vice-versa.
Conversion from bottom mount uWave or RPS to top mount..
Kit Replaces the IRCON analog pyrometers with a new digital pyrometer for more linear temp control. The cast aluminum cooling bases are replaced with new stainless steel cooling bases, to prevent corrosion.
Kit Replaces the IRCON analog AUX pyrometer with a new digital pyrometer for more linear temp control of the dome temperature during clean recipes. The cast aluminum cooling bases are replaced with new stainless steel cooling bases, to prevent corrosion.
Kit Replaces original slow throttle valve with a new fast response throttle valve and chamber exhaust harness. For Reduced Pressure EPI or Poly Chambers.
Kit Replaces the original offset lift with a newer direct lift that reduces vibrations that can cause the wafers to slide inside the chamber during hand-offs.
