HD Pacific, Inc.
AMAT Centura Epi Systems Amat Centura Epi Systems
AMAT Centura Systems AMAT-Centura HT Epi Inquire

APPLIED MATERIALS CVD


Amat Materials (Amat) CVD
Amat Centura (Amat) HDP-CVD
Amat Materials (Amat) WCVD

APPLIED MATERIALS ETCH

Applied Materials (Amat) Metal Etch
Applied Materials (Amat) Oxide Etch
Applied Materials Polysilicon Etch

APPLIED MATERIALS EPI

Amat Centura EPI ATM
Amat Centura EPI RP

APPLIED MATERIALS HTF

Amat Materials (AMAT) Poly
Amat Materials (AMAT) EPI
Amat Materials (AMAT) RTP
Amat Materials (AMAT) Thermal

APPLIED MATERIALS PVD

AMAT Endura PVD
AMAT Centura PVD

APPLIED MATERIALS P5000

Amat P5000 CVD
Amat P5000 Etch
Amat P5000 WCVD

LAM RESEARCH ETCH

Lam Rainbow 4420 Poly Etch
Lam Rainbow 4520 Oxide Etch
Lam TCP 9400 Poly Etch
Lam TCP 9600 Metal Etch

NOVELLUS CVD

Novellus Concept One (C1) CVD
Novellus Concept Two (C2) CVD

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Hardware Supported


Applied Materials Mainframe

  • Centura 5200
  • Centura HT
  • Centura EPI
  • Centura TxZ
  • Endura 5500
  • Precision 5000
  • Producer

 

Applied Materials Chamber Option
Cooldown – MSCD, SSCD
Orientor
CVD -TxZ

DCVD

  • DxL
  • DxZ
  • Producer
  • Ultima HDP-CVD
  • Ultima + HDP-CVD

MCVD

  • WxL
  • WxZ
  • WxP (HeWeb)
  • WSix

Etch

  • Mark II
  • MxP, MxP+, eMxP+, Super E
  • EMAX
  • DPS R0, R1, + Poly
  • DPS R0, R1, + Metal
  • ASP, ASP+

HTF

  • Poly, DCSXZ
  • MOD-1, XE, XE+
  • SiNGen, PolyGen

PVD

  • Standard PVD
  • Standard Water-cool PVD
  • Widebody PVD
  • Vectra IMP PVD
  • Pre-clean II
  • Orienter-Degas

Process Supported


Applied Materials Process Option

DCVD

  • PE Silane
  • PE USG
  • PE BPSG
  • SACVD USG
  • SACVD BPSG
  • SACVD Giga-Fill
  • HDP-CVD

 

EPI

  • ATM EPI (atmospheric)
  • RP EPI (reduced pressure)

 

HTF

  • Poly
  • Nitride
  • OXYNitride
  • DCSXZ
  • RTP
  • SiNGen
  • PolyGen
  • RPN

 

MCVD

  • WCVD
  • W Etch-back
  • WSix
  • CVD TiN

 

PVD

  • Standard Aluminum (Al)
  • Planarized Hot Aluminum (HTHU)
  • Titanium (Ti)
  • Titanium Nitride (TiN)
  • Titanium / Titanium Nitride (TTN)
  • Coherent Ti / Titanium TN (Coh TTN)
  • Titanium Tungsten (TiW)
  • Tungsten (TiW)
HD Pacific, Inc.

4606 107th ST SW, Mukliteo, WA 97275
Tel:425.481.3031 Fax: 425.493.5544